NPGS : Sample Pictures
Diagnostic Images - A Guide to Common SEM Lithography Exposure Problems:
While the images shown above demonstrate very good results in the wide range of applications that NPGS has been used for, when first learning to do lithography, it can be more important to know the cause of common problems. Consequently, the following images are shown to help new users diagnose common exposure problems. By clicking an image below, you will obtain a discussion of the problem displayed and/or instructions on the recommended approach for doing SEM lithography.
Also see the general SEM Optimization Guide and the SEM Lithography Setup Guide.
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Gold Standard * (58kb + 48kb) |
Contamination Spots (48 kb) |
Wheel #1 ~20 nm lines (34 kb + 46 kb) |
Wheel #2* (33 kb + 34 kb) |
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Wheel #3* (30 kb) |
Wheel #4 AFM Image (29 kb) |
Wheel #5 AFM Image (24 kb) |
Wheel #6 (22 + 10 kb) |
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Charging #1 during imaging (20 kb + 17 kb) |
Charging #2 during writing (14kb + 9kb + 15kb) |
Lift-Off*
(55kb + 35kb + 43kb) |
Small Dots
(100 + 83 + 86 kb) |
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Bad Magnification (36 kb + 40 kb) |
Bad Coating (19 kb) |
Line Frequency Noise (22 kb + 10 kb) |
10 kV Wheel
(24 kb) |
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Negative PMMA
(22kb + 14kb + 6kb) |
Double Exposure
(38 kb) |