NPGS Sample Pictures

NPGS : Sample Pictures

Click the images below to see the full picture and a written summary. (Jump down to Diagnostic Images.)

These pictures are best viewed with 16 or 32 bit color enabled. If the background of this page looks obviously speckled, you are using 256 color mode. Viewing with 256 colors will work, but will not display the true sharpness and clarity of the pictures. If the full images appear to have distortions which are not discussed in the text, either the color depth or screen resolution is set too low or the page is being accessed through a cached site which lowers the image resolution in order to increase download speed.


Many Detailed Structures (68 kb)	Rose written in 1989 (51 kb)	Hex Grid (40 kb)	45 Degree Box ~30 nm lines (58 kb)

Free-Standing AuPd Film (24 kb)	Melted AuPd Film (44 kb)	Dammann Grating 800 x 800 microns (52 kb)	Fine AuPd Wires ~30 nm wide (27 kb)

Free-Standing Al Structures (39 kb)	Filled Polygons* (34 kb)	Circular Grating (39 kb)	Circular Grating 0.15 um period (14 kb)

Double Bend Point Contact (32 kb)	Split Gate Structure (39 kb)	Large Bonding Pads for Split Gate (38 kb)	Electroplated SAW Devices (13 kb + 15 kb)

RAM Device (15 kb)	MEMS* Devices (16kb + 20kb + 22kb)	Radial Dots* 0.3 um spacing (18 kb)	Electron Pump AFM image (18 kb)

Dartmouth Seal* (78 kb)	Logarithmic Spirals* (20 kb)	Air Bridge to Quantum Dot (14 kb)	Deeply Etched Optical Resonator (16 kb)

USA Map (31+34+50+32 kb)	Lines of 5nm Au Islands (49 kb)	Crossed Carbon Nanotubes (42 kb)	Multilayer Cu/Co Wire (29 kb)

Magnetic Loops* (using cFE SEM) (38 kb)	Line from a thermal FE SEM (13 kb)	FIB Milling: DaVinci's Vitruvian Man	FIB Milling: Escher drawing

Diagnostic Images - A Guide to Common SEM Lithography Exposure Problems:

While the images shown above demonstrate very good results in the wide range of applications that NPGS has been used for, when first learning to do lithography, it can be more important to know the cause of common problems. Consequently, the following images are shown to help new users diagnose common exposure problems. By clicking an image below, you will obtain a discussion of the problem displayed and/or instructions on the recommended approach for doing SEM lithography.

Also see the general SEM Optimization Guide and the SEM Lithography Setup Guide.


Gold Standard * (58kb + 48kb)	Contamination Spots (48 kb)	Wheel #1 ~20 nm lines (34 kb + 46 kb)	Wheel #2* (33 kb + 34 kb)

Wheel #3* (30 kb)	Wheel #4 AFM Image (29 kb)	Wheel #5 AFM Image (24 kb)	Wheel #6 (22 + 10 kb)

Charging #1 during imaging (20 kb + 17 kb)	Charging #2 during writing (14kb + 9kb + 15kb)	Lift-Off* (55kb + 35kb + 43kb)	Small Dots (100 + 83 + 86 kb)

Bad Magnification (36 kb + 40 kb)	Bad Coating (19 kb)	Line Frequency Noise (22 kb + 10 kb)	10 kV Wheel (24 kb)

Negative PMMA (22kb + 14kb + 6kb)	Double Exposure (38 kb)

* Image was acquired using the NPGS Digital Imaging Feature.

All images on this site are Copyright (c) by JC Nabity Lithography Systems unless otherwise noted. Permission to display these images for non-commercial uses will be given if a request is made in writing before such use and if proper reference to JC Nabity Lithography Systems is displayed with the image(s).