NPGS  : Electroplated SAW Device


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This image shows one edge of a SAW (Surface Acoustic Wave) device after gold has been electroplated to a thickness of 300 nm and the PMMA has been removed. The gold lines are 130 nm wide and the spaces are about 70 to 80 nm wide.
This image shows a SAW transducer that is patterned in 440 nm thick PMMA. The lines and spaces are about 100 nm wide. These patterns were written by Dr. Romuald Bobkowski at the University of Alberta in Canada.