NPGS  : Book List

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The following books are listed as examples of what is available on topics related to SEM lithography. I expect that most technical libraries will have these or similar books available. If desired, the links below will take you to the online bookstore where it is easy to browse among related titles and virtually any book can be ordered. Or use these links to visit the Physics and Engineering sections at Amazon.

Only the books with the comments are personally recommended. If you have any suggestions regarding this list, please send them to "".

Books on Nano/Microlithography, Nano/Microfabrication, and Semiconductor Devices:

Scanning Microscopy for Nanotechnology: Techniques and Applications
Weilie Zhou (Editor), Zhong Lin Wang (Editor)
Hardcover (November 2006)
Springer; ISBN-10: 0387333258; ISBN-13: 978-0387333250
-The book covers nanomaterials imaging, X-ray microanalysis, high-resolution SEM, low kV SEM, cryo-SEM, as well as new techniques such as electron back scatter diffraction (EBSD) and scanning transmission electron microscopy (STEM). Fabrication techniques integrated with SEM, such as e-beam nanolithography, nanomanipulation, and focused ion beam nanofabrication, are major new dimensions for SEM application. Application areas include the study of nanoparticles, nanowires and nanotubes, three-dimensional nanostructures, quantum dots, magnetic nanomaterials, photonic structures, and bio-inspired nanomaterials.

Handbook of Microlithography, Micromachining, and Microfabrication : Microlithography
P. Rai-Choudhury (Editor)
Hardcover Vol 001 (June 1997)
SPIE Press; ISBN: 0819423785
-This is a very thorough book which covers optical lithography, electron beam lithography, and x-ray lithography, as well as a few other related topics. The chapter on e-beam lithography is on the web at "". The section on resists includes actual processing recipes for each resist.

Handbook of Microlithography, Micromachining, and Microfabrication : Micromachining and Microfabrication
P. Rai-Choudhury (Editor)
Hardcover Vol 002 (September 1997)
SPIE Press; ISBN: 0819423793

Microlithography : Science and Technology
James R. Sheats (Editor), Bruce W. Smith (Editor)
Hardcover (May 1998)
Marcel Dekker; ISBN: 0824799534

Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology
Takumi Ueno, Toshio Ito, Saburo Nonogaki
Hardcover illustrate edition (June 1998)
Marcel Dekker; ISBN: 0824799518

Modern Semiconductor Device Physics
S. M. Sze (Editor)
Hardcover - 512 pages (October 1997)
John Wiley & Sons; ISBN: 0471152374

Semiconductor Micromachining : Fundamental Electrochemistry and Physics
H.- J. Lewerenz (Editor), S. A. Campbell (Editor)
Paperback (April 1998)
John Wiley & Sons; ISBN: 0471966819

Semiconductor Micromachining : Techniques and Industrial Applications
H.- J. Lewerenz (Editor), S. A. Campbell (Editor)
Paperback Vol 2 (April 1998)
John Wiley & Sons; ISBN: 0471966827

Fundamentals of Microfabrication
Marc J. Madou
Hardcover - 576 pages (October 1997)
CRC Press; ISBN: 0849394511

The Science and Engineering of Microelectronic Fabrication
Stephen A. Campbell
Hardcover - 536 pages (March 1996)
Oxford University Press; ISBN: 0195105087

Modern Semiconductor Quantum Physics
Ming-Fu Li
Hardcover (April 1995)
World Scientific Pub Co; ISBN: 9810215991

Field Guide to Optical Lithography
Chris A. Mack
Publication Date: Jan 2006; SPIE, 136 pages; Spiral Bound;


See also Handbook of Microlithography, Micromachining, and Microfabrication : Microlithography listed above.

Materials for Microlithography : Radiation-Sensitive Polymers
L.F. Thompson, C.G. Willson, J.M.J. Frechet (Editor)
Hardcover (July 1985)
ACS Symposium Series; ISBN: 0841208719

Micro-And Nanopatterning Polymers
Hiroshi Ito (Editor)
Hardcover (September 1998)
ACS Symposium Series; ISBN: 0841235813

General Reference:

Scanning Electron Microscopy and X-Ray Microanalysis : A Text for Biologists, Materials Scientists, and Geologists
Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy
Hardcover - 820 pages 2nd edition (June 1992)
Plenum Pub Corp; ISBN: 0306441756
-While I have not reviewed any similar books for comparison, this one does seem to be quite thorough and explains the basics of SEMs, as well as x-ray analysis. For someone new to running an electron microscope, this would be a good reference book, since it starts with the history and continues through the fundamentals of all aspects of an electron microscope. Specifically, about 40% of the book is on SEM issues, 40% on X-ray analysis, and 20% on sample preparation techniques.

Handbook of Thin Film Technology
L. Maissel, R. Glang
McGraw-Hill, Inc.; ISBN: 0070397422
-Although this is now an old book, I have found it to be a very useful reference on thin films. It covers everything related to thin films including: vacuum pump technology, deposition techniques, patterning (including e-beam lithography in 1970), and electrical, mechanical, piezoelectric, dielectric, and ferromagnetic properties. If you know of another comprehensive book of this type which is more up to date, please let me know.

Thin Film Processes II
John L. Vossen, Werner Kern (Editor)
Hardcover (April 1991)
Academic Pr; ISBN: 0127282513
-This book had been suggested to me as an updated replacement to the Maissel and Glang handbook listed above, however, after reviewing it, I thought it did not cover as many subjects in as much depth as the Maissel and Glang handbook.

Thin Film Deposition : Principles and Practice
Donald L. Smith
Hardcover (May 1994)
McGraw Hill Text; ISBN: 0070585024

A User's Guide to Vacuum Technology, 2nd Edition
John F. O'Hanlon, John F. C'Hanlon
Hardcover - 512 pages 2 edition (April 24, 1989)
John Wiley & Sons; ISBN: 0471812420

Vacuum Methods in Electron Microscopy, Vol. 15
Wilbur C. Bigelow
Softcover - 512 pages (May 1994) ISBN: 1855780526
Hardcover - 512 pages (May 1994) ISBN: 1855780534
Portland Press

The Art of Electronics
Paul Horowitz, Winfield Hill
Hardcover - 1125 pages 2nd edition (August 1989)
Cambridge University Press; ISBN: 0521370957
-This book has very good examples and is an excellent reference on electronics.

CRC Handbook of Chemistry and Physics (87th Ed)
David R. Lide (Editor)
Hardcover - 2608 pages 87th edition (June 2006)
CRC Press; ISBN-10: 0849304873, ISBN-13: 978-0849304873
-This handbook is updated every year and has a wide range of useful information related to chemistry and physics.

CRC Handbook of Chemistry and Physics (79th Ed)
David R. Lide (Editor)
Hardcover - 2496 pages 79th edition (June 1998)
CRC Press; ISBN: 0849304792
-This is an older version that is much less expensive than the current edition.

The CRC Concise Encyclopedia of Mathematics
Eric W. Weisstein
Hardcover - 1400 pages (November 1998)
CRC Press; ISBN: 0849396409
-I have the older version of the CRC Mathematics Handbook which as been a good math reference and this version seems to be even more thorough.

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