NPGS  : Microscope Considerations


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Select a topic from the following list or scroll down the page to see all the information available:

Microscope Models that have been used with NPGS:

Almost any SEM or STEM can be used with NPGS to perform e-beam lithography. The following is an alphabetical list of the microscopes that have been used with NPGS. Note that some models require optional external inputs from the manufacturer. Often, different models of microscopes from the same manufacturer will have the identical XY interface. Consequently, models that are not shown, may actually be the same as a model already in use with NPGS. Please call or send e-mail if you would like to get the complete NPGS User List which includes names, telephone/fax numbers, e-mail addresses, and microscopes being used. (The models shown below are indicated as: SEM=Scanning Electron Microscope, STEM=Scanning Transmission Electron Microscope, FE-SEM=Schottky (thermal) Field Emission SEM, and cFE-SEM=cold cathode FE-SEM.)

Notes: Cambridge Instruments became Leica, which merged with Zeiss to become LEO, which has now changed to Carl Zeiss - Nano Technology Systems; Philips became FEI.

Overview of Microscope Considerations:

The following is an overview of the considerations that are important when choosing a microscope to be used for lithography. (Also see the summary of microscope features that are useful for lithography on the "Questions and Answers" page.)

Detailed List of Requirements/Specifications/Considerations:

Where appropriate, expected, typical, or preferred responses are shown below in [ ]'s. While NPGS can be used with the most basic of manual SEMs, it also has very advanced features that make use of automated stages and the serial interface to a digital SEM. The items below should cover the most advanced use of the SEM for lithography.

Checking the Performance of an SEM:


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